Nankai University in China Buys Nano Lithography Tools

[grantnano]

Heidelberg Instruments Sell Nano Tools Used in Lithography to a Leading Chinese University

Heidelberg Instruments, GmbH, Heidelberg, Germany, announced the purchase of a DWL66 maskless lithography system by Nankai University Center for Optics Research, located in Tianjin, China. The DWL66 is a unique, maskless lithography system for mask making and direct writing. This system is capable of producing patterns down to 0.6 microns, and is equipped with the capability of thick resist and grey scale exposure, in addition to metrology, front to backside and layer to layer alignment.

“DWL66 systems continue to be a leading laser lithography solution among the research institutions and we are very pleased that Nankai University selected our DWL66 maskless lithography system for their projects in micro optics.” Alexander Forozan, Vice President of World Wide Sales and Marketing, Heidelberg Instruments, GmbH.

Source: Heidelberg Instruments.

URL: http://www.himt.de/news6.html

This story was posted on 28 November 2005.